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Hitachi Receives Japan's Highest Environmental Award for SCDS System



Jun 21, 1999 00:00 AM

Hitachi, Ltd. (NYSE:HIT) and its subsidiary Hitachi America, Ltd. today announced that Hitachi's PFC Catalytic Decomposition System received the Superior Award from the Foundation for Environmental Research Center of Japan, Nikkan Kogyo Shimbun, a daily Japanese business and technology newspaper, and supported by the Environment Agency of the Japanese Government. The awards ceremony was held on June 10, 1999 in Tokyo.

This award was given to Hitachi because of its innovative application of a newly developed proprietary catalyst. This catalytic technology, in combination with air and water, effectively abates PFC's with high efficiency. In addition, the catalyst is completely recycled.

PFC's (Perfluorocompounds) are a family of chemicals containing carbon and fluorine and are essential for semiconductor manufacturing. Although this gas is harmless for human beings, the damaging effect to global warming is several thousand times more than that of carbon dioxide.

In 1997, PFC's became regulated gases in the COP3 (Third Conference of the Parties) held in Kyoto by UNFCCC (United Nations Framework Convention on Climate Change). On April 23, 1999, the World Semiconductor Council (WSC) announced its PFC Emissions Reduction goal to reduce aggregate absolute emissions of PFCs from semiconductor fabrication facilities by 10% or greater by the year of 2010.

Commenting on the announcement, Tomoharu Shimayama, president and CEO of Hitachi America, Ltd., said, "We are pleased that Hitachi has received this important environmental award. It is further proof that Hitachi has become a recognized leader in the development of leading-edge technologies for environmental protection. The Hitachi SCDS can remove or abate exhaust gases and materials from the semiconductor manufacturing process with high efficiency and contribute significantly to the semiconductor industry goals."

The Hitachi catalytic decomposition system (SCDS) will be displayed at SEMICON WEST 99, being held July 12 - 14 at Moscone Center in San Francisco (Booth No. 5180, North Hall).

For more information on Hitachi etchers and gas abatement systems please visit

Hitachi America, Ltd., a subsidiary of Hitachi, Ltd., markets and manufactures a broad range of electronics, computer systems and products, consumer electronics and semiconductors, and provides industrial equipment and services throughout North America. For more information, visit

Hitachi, Ltd., headquartered in Tokyo, Japan, is one of the world's leading global electronics companies, with fiscal 1998 (ended March 31, 1999) consolidated sales of 7,977 billion yen ($65.9 billion (Note a)). The company manufactures and markets a wide range of products, including computers, semiconductors, consumer products and power and industrial equipment. For more information on Hitachi, Ltd., please visit Hitachi's Web site at

Note: At an exchange rate of 121 yen to the dollar.